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Narumi, Kazumasa; Naramoto, Hiroshi
Surface & Coatings Technology, 158-159, p.364 - 367, 2002/09
Irradiation effect of 7 MeV C ions on C thin films on Si(111) substrates were investigated. Raman scattering spectroscopy showed that C film had been already polymerized and that depolymerization of the polymerized C films progressed up to the dose of 1.110/cm. After the depolymerization, the C films were transformed into a form of amorphous carbon at higher dose. The AFM analysis of conductivity of the film shows the results consistent with the Raman-scattering-spectroscopy analysis of the film.
Aruga, Takeo; Katano, Yoshio*; Omichi, Toshihiko*; Jitsukawa, Shiro
Surface & Coatings Technology, 158-159, p.444 - 448, 2002/09
no abstracts in English